Air-bearing positioning stage for magnetic field measurement system of synchrotron radiation

The magnetic field measurement system of synchrotron radiation needs a high accuracy stage of 5-meter stroke which employes air-bearing as the guideway and laser interferometer as the position feedback device to measure and adjust the magnetic field inside the tunnel.

ITEM  Z axis
Stroke Effective (mm) 5000
Maximal (mm) 5200
Resolution  (um) 0.02
Straightness (um) <1
Flatness (um) <1
Repeatability  (um) +/- 0.1
Accuracy (um)

(with laser calibration)

<0.5
Maximal speed (m/sec) 0.5
Maximal Acc. (G) 1
  • Air bearing is used to achieve long stroke precision motion.
  • Extremely low cogging linear motor is used to minimize speed ripple.
  • Symmetrical cable chains is designed to cancel out the bending force from cables.
Scroll to Top