Miniature positioning stage of nano precision (6 DOF)

Miniature positioning stage of nano precision provides the complete solution of 6 DOF accurate motion. This series include 4 modules as follows:

• Single axis linear motion stage
• Wedge lift vertical motion stage
• Rotational motion stage
• Common pivot center Pitch-Roll motion stage

Each module has various size for selection. They can be stacked together to form at most 6 degree of freedom motion stage. We also provide tailor made service, for example, modifying the stages for high vacuum application.

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Applications

• • Pin insertion for Probe card assembly
  • Active alignment (AA) equipment for camera module assembly
  • Optical fiber alignment equipment
  • Flexible panel bonding equipment
  • Inspection equipment for semiconductor
  • Biological inspection equipment

 And other applications need high accuracy positioning but with very limit space.

MTSA Single axis linear motion stage

• • Zero cogging linear motor is employed to achieve zero backlash motion.
  • Miniature linear ball bearing is adopted to eliminate the dust-prof and the creepy problem caused by conventional cross roller guide.
  • The moderate attractive force of the linear motor can be used to preload the linear guide to achieve minimal stepping of 20 nm and the repeatability of ±0.1um.
  • Miniature optical encoder and programable resolution interpolator is used to ease application.
  • Compact stage design makes mounting holes compatible to conventional hand tuning micro stage.

1. Model designation：

 

2. Specification：

Mechanical parameters	Units	MTSA060	MTSA080	MTSA120
Total stroke	mm	19	19	38
Effective stroke	mm	16	16	36
Straightness	um	＜1	＜1	＜1
Flatness	um	＜3	＜3	＜3
Repeatability	um	±0.1	±0.1	±0.1
Accuracy*	um	＜0.5	<0.5	<0.5
Moving mass	g	177	190	640
Total mass	g	275	377	1000
Electrical parameters	Units	MTSA060	MTSA080	MTSA120
Peak force	Nt	8.1	16	30
Conti. force	Nt	2.7	4	10
Peak current	A	0.75	2	3
Conti. current	A	0.25	0.5	1
Force constant	Nt/Apeak	10.8	8.1	10.8
Back EMF	Vpeak（per phase）/m/s	3.6	2.7	3.6
Resistance（line-to-line）	ohm	33	11	8.2
Inductance（line-to-line）	mH	1.3	0.44	0.3
Pole pair length	Mm	9.6	9.6	9.6
Motor voltage	V	24	24	24

 

3. Pin definition：

 

4. Dimension：

 

MTRA Rotational motion stage

• Zero cogging rotary motor is employed to achieve zero backlash motion.
• Slim design with special bearing to achieve high rigidity and excellent flatness.
• Finite rotation stroke with the maximal angle of 180 degree.
• Large center hole to ease optical path arrangement.
• Miniature optical encoder and programable resolution interpolator is used to ease application.

1. Model designation：

 

 

2. Specification：

Mechnical parameters	Units	MTRA060	MTRA080	MTRA120
Total stroke	degree	100/190	100/190	100/190
Effective stroke	degree	90/180	90/180	90/180
Resolution	arcsec	0.13307	0.1006	0.0687
Concentricity deviation	um	±2	±2.5	±3.5
Flatness deviation	um	±3	±3.5	±4.5
Repeatability	arcsec	±0.3	±0.3	±0.3
Accuracy	arcsec	＜±2.5	<±2	<±2
Rotor inertia	Kg-mm^2	49	181	850
Total mass	g	250	433	920
Electrical parameters	Units	MTRA060	MTRA080	MTRA120
Peak torque	Nt-m	0.45	0.78	1.71
Conti. torque	Nt	0.15	0.26	0.57
Peak current	A	1.5	1.5	1.5
Conti. current	A	0.5	0.5	0.5
Torque constant	Nt-m/Apeak	0.3	0.52	10.8
Back EMF	Vpeak（per phase）/rad/s	0.1	2.7	3.6
Resistance（line-to-line）	ohm	7.1	9.4	14
Inductance（line-to-line）	mH	2.3	5.8	13
Number of poles		12	16	24
Motor voltage	V	24	24	24

 

3. Pin definition：

4. Dimension：

MTZA Wedge lift vertical motion stage

• Wedge structure is used to magnify the lift force so that the center of gravity of payload is not offset from the thrust axis.
• Zero cogging linear motor is employed to achieve zero backlash motion.
• The moderate attractive force of the linear motor can be used to preload the linear guide to achieve minimal stepping of 20 nm and the repeatability of ±0.1um.
• Miniature optical encoder and programable resolution interpolator is used to ease application.
• Usually used as the base stage to lift other axes above.

1. Model designation：

2. Specification：

Mechanical parameters	Units	MTZA100	MTZA150
Total stroke	mm	4	8
Effective stroke	mm	3	7
Straightness	um	＜1	＜1
Flatness	um	＜3	＜3
Repeatability	um	±0.1	±0.1
Accuracy	um	＜0.5	<0.5
Moving mass	g	320	646
Total mass	g	958	2500
Electrical parameters	Units	MTZA100	MTZA150
Peak force	Nt	160	288
Conti. force	Nt	40	72
Peak current	A	4	8
Conti. current	A	1	2
Force constant	Nt/Apeak	40	33.7
Back EMF	Vpeak（per phase）/m/s	13.3	11.2
Resistance（line-to-line）	ohm	5.5	2.75
Inductance（line-to-line）	mH	0.22	0.11
Pole pair pitch	mm	1.6	1.6
Motor voltage	V	24	24

 

 

 

3. Pin definition：

4. Dimension：

 

MTPR Common pivot center pitch-roll motion stage

• Common pivot center structure is employed for both pitch and roll axes so that the calibration of motion center is simplified.
• Zero cogging linear motor is employed to achieve zero backlash motion.
• The effective pitch/roll angle is ±5 degree
• Miniature optical encoder and programable resolution interpolator is used to ease application.

1. Model designation：

2. Specification：

Mechanical parameters	Units	MTPR080
Pitch/Roll total stroke	degree	±7
Pitch/Roll effective stroke	degree	±5
Resolution	arcsec	0.0987
Repeatability	arcsec	±0.3
Accuracy	arcsec	＜±2.5
Rotor inertia	Kg-mm^2	26
Total mass	g	640
Electrical parameters	Units	MTPR080
Peak torque	Nt-m	0.52
Conti. torque	Nt	0.13
Peak current	A	2
Conti. current	A	0.5
Torque constant	Nt-m/Apeak	0.26
Back EMF	Vpeak（per phase）/rad/s	0.08
Resistance（line-to-line）	ohm	33
Inductance（line-to-line）	mH	1.3
Pole pair pitch	mm	9.6
Motor voltage	V	24

 

 

3. Pin definition：

4. Dimension：

 

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資料名	檔案名	備註
Catalog of miniature positioning stage of nano precision	Miniature Nano Precision 6 DOF Positioning Stage.pdf	PDF
MTSA series assembly	MTSA.rar	3D
MTRA series assembly	MTRA.rar	3D
MTZA series assembly	MTZA.rar	3D
MTPR080 assembly	MTPR080.rar	3D