Electrical discharging machine has been on the road toward submicron accuracy. This stage uses blind cover to prevent from water dropping. In addition, linear motor together with high grade optical encoder are employed to achieve high accuracy and smooth operation.
| ITEM | X axis (up) | Yaxis(down) | Z axis | |
| Stroke | Effective (mm) | 150 | 150 | |
| Maximal (mm) | 160 | 160 | ||
| Resolution (um) | 0.02 | 0.02 | ||
| Straightness (um) | <1 | <1 | ||
| Flatness (um) | <5 | <5 | ||
| XYZ squareness (um) | <3 | |||
| Repeatability (um) | +/- 0.05 | +/- 0.05 | ||
| Accuracy (um)
(with laser calibration) |
< 0.5 | < 0.5 | ||
| Maximal speed (m/sec) | 1 | 1 | ||
| Maximal Acc. (G) | 3 | 3 | ||
- The up axis and down axis are stacked with a very low profile design. The distance between working surface of up axis and linear guide mounting surface of down axis is only 100 mm.
- Wide span design of down axis together with driven by dual linear motors eliminates resonance in yaw direction due to gravity center change of up axis.
- Built-in cable chain and blind path cover to improve protection grade.
- Ultra-low cogging force linear motors are employed.