Electron-beam microscope needs to be operated in the vacuum environment of 10e-7 Torr. Besides the high vacuum compatibility to prevent outgassing, the stages used in this environment must solve the problem of heat dissipation produced by motors. By using special decoupling mechanism, the motor windings of this stage are all stationary so that the heat can be dissipated to the frame of vacuum chamber.
| ITEM | X axis | Y axis | R axis | |
| Stroke | Effective (mm) | 310 | 450 | 360 degree |
| Maximal (mm) | 320 | 460 | 360 degree | |
| Resolution (um) | 0.02 | 0.02 | 0.1 arcsec | |
| Straightness (um) | <1 | <1 | <1 (concentricity) | |
| Flatness (um) | <3 | <3 | <1 | |
| Repeatability (um) | +/- 0.3 | +/- 0.3 | +/- 0.5 arcsec | |
| Accuracy (um)
(with laser calibration) |
<0.5 | <0.5 | <2 arcsec | |
| Maximal speed (m/sec) | 0.4 | 0.4 | 15 rpm | |
| Maximal Acc. (G) | 1.5 | 1.5 | 1 | |
- All motor windings are stationary so that the heat can be dissipated to the frame of vacuum chamber.
- Extremely low cogging linear motor is used to minimize speed ripple.
- High vacuum compatible to 10 e-7 Torr.